• +++

    THE MNE2011 WAS A GREAT SUCCESS! WE WOULD LIKE TO THANK ALL ATTENDEES, SPEAKERS, AUTHORS, EXHIBITORS AND SPONSORS FOR THEIR PARTICIPATION, VALUABLE CONTRIBUTIONS AND SUPPORT.

    +++

SCOPE OF THE CONFERENCE

TECHNICAL TOPICS

MICRO AND NANO LITHOGRAPHY

 

Nano imprint lithography:
systems, alignment, nano imprint methods, results and applications,
stamp fabrication…

 

Maskless lithography:
photon, charged particle, proximal probe techniques, sources,
optics, systems, alignment, modelling, throughput...

 

Photon lithography:
DUV, immersion, EUV, sources, optics, systems, mask technology,
alignment, optical proximity correction, lithography modelling, novel
techniques…

 

Electron and Ion beam lithography:
sources, optics, systems, alignment, e-beam proximity correction,
e-beam mask writer, ion beam surface interactions…

 

Materials for micro and nano lithography:
resists, polymers for imprinting, molecular resists, thin films,
multilayer and inorganic resists, antireflective coatings, surface
imaging, conductive films, chemical amplification, wet and dry
processing, characterisation, modelling…

MICRO AND NANO FABRICATION AND ENGINEERING

Nano fabrication with top-down and bottom-up approaches:
novel fabrication methods, self-assembly, directed self-assembly,
bottom-up and top-down combination, surface nano engineering,
miniaturisation limits, scanning probe techniques, nano scale
modelling…

Pattern transfer and plasma etching:
nano scale etching, litho-etch interactions, etching for M(N)EMS
and bioMEMS, etch damage, lift-off, plating, sputtering, beam
etching / deposition, modelling…

Nano metrology:
inspection, testing, metrology and in-situ process measurements,
devices and circuits, nanoscale metrology…

Nano electronic / photonic devices:
nano electronics, nano optics / nano photonics, N(O)EMS, nano
mechanical devices, nano magnetics, data storage, carbon nano
tube devices, molecular devices, characterisation...

Micro and nano manufacturing:
transfer of nano fabrication and nano science from lab to industry,
manufacturable production of nano structures, devices, and
systems…

MICRO AND NANO FABRICATION FOR LIFE SCIENCES

Micro and nano fluidics, devices for biology, chemistry, medicine:
micro / nano fluidics fabrication and characterisation, micro biodevices,
nano medicine targeted devices, microarrays, micro
nano devices for chemical analysis, nano biotechnology applications…
Micro and nano systems for biology, chemistry, medicine:
BioMEMS, Lab-on-a-chip, μTAS…

MICRO AND NANO SYSTEMS AND THEIR FABRICATION, MEMS,
NEMS, MICRO OPTICS, PHOTOVOLTAIC:

surface and bulk micro machining, 3D structures, stereolithography,
rapid prototyping, moulding, new materials, sensors and actuators,
M(O)EMS, RF-MEMS/NEMS, electromechanical passive devices,
RF mechanical resonators…

CONTACT

 

Feel free to get
in touch.

Phone: +49 30 657621 92

Fax: +49 30 657621 93

 

Email:

congressorg@microresist.de

 

micro resist technology GmbH
Chair: Mrs. Gabi Gruetzner, Managing Director
Koepenicker Strasse 325,

Haus 211
12555 Berlin / Germany

Infobox

Deadlines

IMPORTANT DEADLINES

  • EARLY REGISTRATION RATES UNTIL: 12 AUGUST, 2011
  • SPECIAL HOTEL BOOKING RATES UNTIL: MID OF AUGUST, 2011
  • ABSTRACT DEADLINE: 20 JUNE, 2011
  • ABSTRACT ACCEPTANCE: 26 JULY, 2011
  • MANUSCRIPT SUBMISSION UNTIL:
    10 OCTOBER, 2011
  • MANUSCRIPT REVIEW:
    DUE TO THE LARGE NUMBER OF PAPERS STILL ONGOING (STATE FEBRUARY 2012)!
  • MANUSCRIPT PUBLICATION:
    SPRING 2012

Links of Sponsors & Exhibitors

Photos